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Breakthroughs in photonics 2012: Nano-structuring and nano-fabrication enabled by extreme ultraviole
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发布时间:2017/1/17 14:39:53                                     【字号:  】                                             【打印】 
Abstract:
Two- and three-dimensional structures with submicron dimensions, such as photonic crystals, patterned magnetic media, micro- and nano-electromechanical systems (MEMs/NEMs), microfluidics chips, etc., are becoming ubiquitous in multiple applications across many research fields. The necessity to engineer these devices has inspired the development of novel nanofabrication and nano-patterning methods. This review describes major accomplishments in laser-based nano-patterning and nano-fabrication methods. In particular, it focuses on newly developed nano-patterning techniques based on the use of extreme ultraviolet laser light that contributes to the rapid and efficient fabrication of periodic nano-structures.
链接:http://ieeexplore.ieee.org/document/6512093/?arnumber=6512093
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