Huigao Duan

Name of the Speaker: Dr. Zhang Qingzhao
Position: Technology Director of Equipment and Process
Company/Organization: Institute of Microelectronics of Chinese
Academy of Sciences (IMECAS)
Nationality: China

The  Title of  Speech:  The  application and  equipment  of  the Micro/Nano  fabrication technologies

Biography of the Speaker:
Since May 2014 Dr.  zhang is in charge of the department of semi-equipment development in IMECAS with responsibility for hardware design and process research.  So far, his achievements in commercial products include the plasma etching (RIE/ICP), chemical vapor deposition (PECVD), physical vapor deposition (PVD), atom layer deposition (ALD), and also some type of customized process equipment.

From 2011~2014 Dr. Zhang worked in the company of Hanergy Holding Group  Ltd., as technology director in Global RD center with his responsibly for technology assessment and global acquisitions activities.

From 2004~2011 Dr. zhang worked in the company of NMC, as the product  anager for 300mm plasma etching tool development.

Abstract of Speech:
The technology of Micro/Nano fabrication has a deep application in the field of
Semiconductor, LED, MEMS, Power IC, Advanced Packaging, Optical Communication, Compound Semi and New Energy, also in the field of material  research. The technology of Micro/Nano fabrication originated from silicon process, and so far it has become a key player in modern leading-edge fabrication in mass production, and also in R&D research area. The presentation will elucidate the key equipments in Micro/Nano fabrication,  also their process application:


    • Plasma etching
    • PECVD
    • Sputtering
    • ALD
    • Customized equipment